Study of Novel Piezo-Actuated XYθ z Micropositioning Mechanism using Piezoelectric Actuator

Abstract

The piezoelectric actuator is one of the most commonly used actuators to drive a micro-and nano positioning application. Therefore, to start with, an in-depth discussion of different micro-and nano positioning applications, which use a piezoelectric actuator for actuation purpose, is provided, to justify the claim that it is one of the most commonly used actuators in such applications.

Presence of hysteresis and creep severely affects the performance of a piezoelectric actuator driven micro-and nano positioning application. A large number of methodologies, ranging from driving techniques to control techniques, are proposed and implemented to minimize the effect due to hysteresis and creep and, thus, to improve the performance of the application. A detailed review of all such methodologies is provided in this paper.